ELS-BODEN Σ

  • Client

    ELIONIX
  • Release Date

    2021
  • Designer

    Yutaro Kumagai
  • Photos

    YD

The industry's fastest electron beam
lithography system

Industry's fastest 400MHz high-speed scanning.
High-speed beam scanning at four times the speed of previous Elionix products makes it possible to draw at higher currents and narrower beam pitches than previously possible, enabling faster, higher quality drawing.
The parts configuration and colour scheme were studied so that the four enclosures could be used as a single product.
We also designed a layout that considered the user's line of sight when using the product and the behaviour and movements of workers during maintenance.
The aim was to ensure that everyone involved with the product can use it safely and comfortably.

top